AlGaN/GaN heterojunction hydrogen sensor using ZnO-nanoparticles/Pd dual catalyst layer
- Authors
- Choi, J.-H.; Park, T.; Hur, J.; Cha, H.-Y.
- Issue Date
- Dec-2020
- Publisher
- ELSEVIER SCIENCE SA
- Keywords
- AlGaN/GaN heterojunction; Hydrogen sensor; Nanoparticle synthesis; Pd catalyst; ZnO nanoparticle
- Citation
- SENSORS AND ACTUATORS B-CHEMICAL, v.325
- Journal Title
- SENSORS AND ACTUATORS B-CHEMICAL
- Volume
- 325
- URI
- https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/79093
- DOI
- 10.1016/j.snb.2020.128946
- ISSN
- 0925-4005
- Abstract
- ZnO-nanoparticles (NPs) were investigated for improving the response characteristics of a Pd-functionalized AlGaN/GaN heterojunction-based hydrogen gas sensor. The ZnO-NPs of diameter ∼10 nm were dispersed in a co-solvent of chloroform/ethanol (chloroform 75 %, v/v), which was found to be an optimal solution for uniform dispersion, and spin coated on the surface of the fabricated Pd/AlGaN/GaN hydrogen sensor. The ZnO-NP synthesis and dispersion methods were optimized carefully before being applied to sensor fabrication. It was observed that the addition of ZnO-NPs to the Pd catalyst enhanced the hydrogen absorption so that the response of the hydrogen sensor was improved. Compared with the single Pd catalyst layer, the ZnO-NPs/Pd double layer exhibited superior response characteristics—a response of ∼210 % and response time of ∼2 s were achieved at 200 °C with a bias voltage of 3 V. © 2020 Elsevier B.V.
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