Nd:YVO4 Laser Direct Patterning of Aluminum-Doped Zinc Oxide Films Sputtered Under Different Process Conditions
DC Field | Value | Language |
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dc.contributor.author | Heo, Jaeseok | - |
dc.contributor.author | Kwon, Sang Jik | - |
dc.contributor.author | Cho, Eou Sik | - |
dc.date.available | 2020-02-28T00:45:04Z | - |
dc.date.created | 2020-02-07 | - |
dc.date.issued | 2016-09 | - |
dc.identifier.issn | 1947-2935 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/7976 | - |
dc.description.abstract | To examine the application of aluminum-doped zinc oxide (AZO) to photovoltaic devices, a study on the direct ablation of AZO deposited at different pulsed-DC sputtering powers has been performed with a Q-switched diode-pumped neodymium-doped yttrium vanadate (Nd:YVO4, lambda = 1064 nm) laser. From the laser-ablated results, it was possible to obtain a lower ablation threshold and more easily etched patterns on AZO deposited at 1 kW than on AZO deposited at 3 kW. The different ablation results show that the heating and subsequent thermal effects by Nd:YVO4 laser with a wavelength of 1064 nm are influenced by the atomic percentage of Zn and Al, the crystallinity, and the grain size of AZO films caused by the sputtering power. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | AMER SCIENTIFIC PUBLISHERS | - |
dc.relation.isPartOf | SCIENCE OF ADVANCED MATERIALS | - |
dc.subject | SUBSTRATE | - |
dc.subject | ELECTRODE | - |
dc.subject | ABLATION | - |
dc.subject | ITO | - |
dc.title | Nd:YVO4 Laser Direct Patterning of Aluminum-Doped Zinc Oxide Films Sputtered Under Different Process Conditions | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.description.journalClass | 1 | - |
dc.identifier.wosid | 000392835600011 | - |
dc.identifier.doi | 10.1166/sam.2016.2922 | - |
dc.identifier.bibliographicCitation | SCIENCE OF ADVANCED MATERIALS, v.8, no.9, pp.1783 - 1789 | - |
dc.identifier.scopusid | 2-s2.0-85012096232 | - |
dc.citation.endPage | 1789 | - |
dc.citation.startPage | 1783 | - |
dc.citation.title | SCIENCE OF ADVANCED MATERIALS | - |
dc.citation.volume | 8 | - |
dc.citation.number | 9 | - |
dc.contributor.affiliatedAuthor | Heo, Jaeseok | - |
dc.contributor.affiliatedAuthor | Kwon, Sang Jik | - |
dc.contributor.affiliatedAuthor | Cho, Eou Sik | - |
dc.type.docType | Article | - |
dc.subject.keywordAuthor | Aluminum-Doped Zinc Oxide (AZO) | - |
dc.subject.keywordAuthor | Laser Ablation | - |
dc.subject.keywordAuthor | Sputtering Power | - |
dc.subject.keywordAuthor | Grain Size | - |
dc.subject.keywordPlus | SUBSTRATE | - |
dc.subject.keywordPlus | ELECTRODE | - |
dc.subject.keywordPlus | ABLATION | - |
dc.subject.keywordPlus | ITO | - |
dc.relation.journalResearchArea | Science & Technology - Other Topics | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Nanoscience & Nanotechnology | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
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