산화물기반 박막트랜지스터 전극용 ITO박막의 제작시 투입 산소 분압 의존성
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 김경환 | - |
dc.date.accessioned | 2021-07-02T10:40:08Z | - |
dc.date.available | 2021-07-02T10:40:08Z | - |
dc.date.created | 2021-07-02 | - |
dc.date.issued | 2021-06 | - |
dc.identifier.issn | 1738-2270 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/81441 | - |
dc.description.abstract | In this study, we investigated the oxygen partial pressure effect of ITO films for electrodes of oxide-based Thin-Film Transistor (TFT). Firstly, we deposited single ITO films on the glass substrate at room temperature. ITO films were prepared at the various partial pressures of oxygen gas 0-7.4% (O2/(Ar+O2)). As increasing oxygen on the process of film deposition, electrical properties were improved and optical transmittance increased in the visible light range (300-800 nm). For the electrode of TFT, we fabricated a TFT device (W/L=1000/200 µm) with ITO films as the source and drain electrode on the silicon wafer. Except for the TFT device combined with ITO film prepared at the oxygen partial pressure ratio of 7.4 %, We confirmed that TFT devices with ITO films via FTS system operated as a driving device at threshold voltage (Vth) of 4V. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | 한국반도체디스플레이기술학회 | - |
dc.relation.isPartOf | 반도체디스플레이기술학회지 | - |
dc.title | 산화물기반 박막트랜지스터 전극용 ITO박막의 제작시 투입 산소 분압 의존성 | - |
dc.title.alternative | Dependency of oxygen partial pressure of ITO films for electrode of oxide-based Thin-Film Transistor | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.description.journalClass | 2 | - |
dc.identifier.bibliographicCitation | 반도체디스플레이기술학회지, v.20, no.2, pp.82 - 86 | - |
dc.identifier.kciid | ART002733266 | - |
dc.description.isOpenAccess | N | - |
dc.citation.endPage | 86 | - |
dc.citation.startPage | 82 | - |
dc.citation.title | 반도체디스플레이기술학회지 | - |
dc.citation.volume | 20 | - |
dc.citation.number | 2 | - |
dc.contributor.affiliatedAuthor | 김경환 | - |
dc.subject.keywordAuthor | TFT | - |
dc.subject.keywordAuthor | ITO | - |
dc.subject.keywordAuthor | Oxygen | - |
dc.subject.keywordAuthor | Sputtering. | - |
dc.description.journalRegisteredClass | kci | - |
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