Pulsed-DC magnetron sputtering of intrinsic ZnO film and its application to CIS solar cell
DC Field | Value | Language |
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dc.contributor.author | Lee, Yeon Joo | - |
dc.contributor.author | Cho, Eou-Sik | - |
dc.contributor.author | Kwon, Sang Jik | - |
dc.date.available | 2020-02-28T02:43:09Z | - |
dc.date.created | 2020-02-06 | - |
dc.date.issued | 2016-04 | - |
dc.identifier.issn | 0042-207X | - |
dc.identifier.uri | https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/8428 | - |
dc.description.abstract | To create an intermediate layer in CuInSe2(CIS)-based solar cells, an intrinsic zinc oxide(i-ZnO) thin film was deposited on a glass substrate and a cadmium sulfide(CdS) buffer layer using an in-line pulsed-DC sputtering. In comparison with i-ZnO films sputtered using RF power, i-ZnO films sputtered using pulsed DC power showed much higher deposition rates and similar structural characteristics, without causing any damage to the CdS buffer layer. During pulsed-DC sputtering, the O-2/Ar gas ratio, reverse time, and pulse frequency were changed to optimize the process parameters. From the transmittance and scanning electron microscope(SEM) images, the optimized i-ZnO film was obtained at an O-2/Ar gas ratio of 1%, a pulsed frequency of 200 kHz, and a reverse time of 1.3 mu s. For showing the feasibility, it was applied to the fabrication of a CIS solar cell which was processed using the two step method by the rapid thermal processing (RTP) annealing of Cu-In stacked layers. It showed a possibility of the pulsed-DC sputtered ZnO as an intermediate layer of a CIS solar cell even though a cell efficiency was shown with a low value of 2.2% due to an early stage of our study in the two step CIS process. (C) 2016 Elsevier Ltd. All rights reserved. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | PERGAMON-ELSEVIER SCIENCE LTD | - |
dc.relation.isPartOf | VACUUM | - |
dc.subject | OXIDE THIN-FILMS | - |
dc.subject | ZINC-OXIDE | - |
dc.subject | LASER DEPOSITION | - |
dc.subject | PERFORMANCE | - |
dc.subject | LAYER | - |
dc.title | Pulsed-DC magnetron sputtering of intrinsic ZnO film and its application to CIS solar cell | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.description.journalClass | 1 | - |
dc.identifier.wosid | 000372383700017 | - |
dc.identifier.doi | 10.1016/j.vacuum.2016.01.017 | - |
dc.identifier.bibliographicCitation | VACUUM, v.126, pp.91 - 100 | - |
dc.identifier.scopusid | 2-s2.0-84957582478 | - |
dc.citation.endPage | 100 | - |
dc.citation.startPage | 91 | - |
dc.citation.title | VACUUM | - |
dc.citation.volume | 126 | - |
dc.contributor.affiliatedAuthor | Lee, Yeon Joo | - |
dc.contributor.affiliatedAuthor | Cho, Eou-Sik | - |
dc.contributor.affiliatedAuthor | Kwon, Sang Jik | - |
dc.type.docType | Article | - |
dc.subject.keywordAuthor | Intrinsic zinc oxide (i-ZnO) | - |
dc.subject.keywordAuthor | Pulsed-DC sputtering | - |
dc.subject.keywordAuthor | CIS solar cell | - |
dc.subject.keywordAuthor | Deposition rate | - |
dc.subject.keywordPlus | OXIDE THIN-FILMS | - |
dc.subject.keywordPlus | ZINC-OXIDE | - |
dc.subject.keywordPlus | LASER DEPOSITION | - |
dc.subject.keywordPlus | PERFORMANCE | - |
dc.subject.keywordPlus | LAYER | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
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