Chip-Based MEMS for Healthcare Application

Abstract

This paper reviews the recent development of micro-/nanosensors to detect air pollutants. Various sensor technologies to measure particles and gaseous pollutants are introduced. For particulate pollutants including particulate matter (PM) 10 (PM10), PM2.5, and nanoparticles, the development and sensitivities of resonate sensors are investigated. For gaseous pollutant detection, nanostructured metal oxide, surface acoustic wave sensors, field-effect transistor sensors, and microcantilever sensor system are briefly discussed. Sensors with a microelectromechanical systems (MEMS) technology showed high sensitivities, accuracy, and selectivity for air pollutants. Air quality monitoring chip using MEMS technology is based on the increasing demand for more compact, integrated, and personalized device to monitor the in situ level of air pollutants with simple operation and high precision in real time. Furthermore, the potential of the chip-based MEMS for healthcare applications is investigated. © Springer Science+Business Media, LLC, part of Springer Nature 2022.