An SC Interface With Programmable-Gain Embedded Delta Sigma ADC for Monolithic Three-Axis 3-D Stacked Capacitive MEMS Accelerometer
DC Field | Value | Language |
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dc.contributor.author | Jun, Jaehoon | - |
dc.contributor.author | Rhee, Cyuyeol | - |
dc.contributor.author | Kim, Sangwoo | - |
dc.contributor.author | Kim, Suhwan | - |
dc.date.accessioned | 2023-07-24T07:40:28Z | - |
dc.date.available | 2023-07-24T07:40:28Z | - |
dc.date.created | 2023-07-24 | - |
dc.date.issued | 2017-09 | - |
dc.identifier.issn | 1530-437X | - |
dc.identifier.uri | https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/88624 | - |
dc.description.abstract | This paper presents a switched capacitor interface circuit for a monolithic three-axis capacitive micro-electromechanical system (MEMS) accelerometer. The MEMS sensor and the interface circuit of our system-in-package-type MEMS accelerometer are 3-D stacked to optimize integration density with a small package footprint. The proposed fully integrated interface circuit includes a capacitance-to-voltage converter followed by a Delta Sigma analog-to-digital converter (ADC). To optimize system power and area, the programmable-gain functionality is embedded to the second-order Delta Sigma ADC without any stability degradation. The offset and 1/f noise of the fully differential interface circuit are mitigated by a correlated double sampling technique. The rest of the low-frequency error from system mismatch is also suppressed by calibration using fine metaloxide-semiconductor capacitor array. The measurement results of our MEMS accelerometer show a 13.7-b maximum effective resolution with the 197-mu g/ root Hz noise floor in a conversion time of 1 ms with a maximum nonlinearity of 1.09%. Implemented in a standard 0.18-mu m CMOS technology, the fabricated chip consumes only 247-mu A current from a 3.3-V supply, and 37-mu A current from a 1.8-V supply. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC | - |
dc.relation.isPartOf | IEEE SENSORS JOURNAL | - |
dc.title | An SC Interface With Programmable-Gain Embedded Delta Sigma ADC for Monolithic Three-Axis 3-D Stacked Capacitive MEMS Accelerometer | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.description.journalClass | 1 | - |
dc.identifier.wosid | 000407475200023 | - |
dc.identifier.doi | 10.1109/JSEN.2017.2725486 | - |
dc.identifier.bibliographicCitation | IEEE SENSORS JOURNAL, v.17, no.17, pp.5558 - 5568 | - |
dc.description.isOpenAccess | N | - |
dc.identifier.scopusid | 2-s2.0-85023604098 | - |
dc.citation.endPage | 5568 | - |
dc.citation.startPage | 5558 | - |
dc.citation.title | IEEE SENSORS JOURNAL | - |
dc.citation.volume | 17 | - |
dc.citation.number | 17 | - |
dc.contributor.affiliatedAuthor | Rhee, Cyuyeol | - |
dc.type.docType | Article | - |
dc.subject.keywordAuthor | 3-Axis acceleration sensing system | - |
dc.subject.keywordAuthor | interface circuit | - |
dc.subject.keywordAuthor | delta-sigma ADC | - |
dc.subject.keywordAuthor | MEMS | - |
dc.subject.keywordAuthor | Delta Sigma modulators | - |
dc.subject.keywordAuthor | programmable-gain ADC (PGADC) | - |
dc.subject.keywordPlus | OFFSET | - |
dc.subject.keywordPlus | CIRCUIT | - |
dc.subject.keywordPlus | NOISE | - |
dc.relation.journalResearchArea | Engineering | - |
dc.relation.journalResearchArea | Instruments & Instrumentation | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Engineering, Electrical & Electronic | - |
dc.relation.journalWebOfScienceCategory | Instruments & Instrumentation | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
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