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Impact of thermal expansion coefficient on the local tilt angle of extreme ultraviolet pellicleGo to Linkopen access

Kim, Junghwan; 김하늘; Ahn, Jinho

ArticleIssue Date2022CitationJournal of Micro/Nanopatterning, Materials and Metrology, v.21, no.1, pp 1 - 14PublisherSPIE
SCIESCOPUS
Study on ZrSi2 as a Candidate Material for Extreme Ultraviolet PelliclesGo to Linkopen access

위성주; 김원진; 김하늘; 정동민; 이동기; Choi, Jaehyuck; Cho, Sang Jin; Yu, Lan; Ahn, Jinho

ArticleIssue Date2023CitationMembranes, v.13, no.8, pp 1 - 10PublisherMDPI
SCIESCOPUSKCI
나노스케일 질화규소 멤브레인의 기계적, 열적 특성 분석Go to Linkopen access

장용주; 신현진; 위성주; 김하늘; 이기성; 안진호

ArticleIssue Date2019CitationKOREAN JOURNAL OF METALS AND MATERIALS, v.57, no.2, pp.124 - 129PublisherKOREAN INST METALS MATERIALS
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