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Impact of N2O Plasma Reactant on PEALD-SiO2 Insulator for Remarkably Reliable ALD-Oxide Semiconductor TFTs Go to Link

Kim, Dong-Gyu; Yoo, Kwang Su; 김혜미; Park, Jin-Seong

ArticleIssue Date2022CitationIEEE Transactions on Electron Devices, v.69, no.6, pp 3199 - 3205PublisherInstitute of Electrical and Electronics Engineers

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Plasma-enhanced atomic layer deposition of aluminum-indium oxide thin films and associated device applications Go to Link

이원범; Jeong, Hyun-Jun; 김혜미; Park, Jin-Seong

ArticleIssue Date2022CitationJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, v.40, no.3, pp 1 - 7PublisherAVS Science and Technology Society

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Browsing by 김혜미Author

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