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High mobility and productivity of flexible In2O3 thin-film transistors on polyimide substrates via atmospheric pressure spatial atomic layer depositionGo to Link

Yoo, Kwang Su; 이치훈; 김동규; Choi, Su-Hwan; 이원범; Park, Chang-Kyun; Park, Jin-Seong

ArticleIssue Date2024CitationApplied Surface Science, v.646, pp 1 - 9PublisherElsevier BV
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