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Mode transition of power dissipation and plasma parameters in an asymmetric capacitive dischargeGo to Link

Lee, Soo-Jin; Lee, Hyo-Chang; Bang, Jin-young; Oh, Seung-Ju; Chung, Chin-Wook

ArticleIssue Date2013CitationThin Solid Films, v.547, pp 38 - 42PublisherElsevier Sequoia
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