ScholarWorks@Hanyang University

Browsing by Cho, YoonsungAuthor

All A B C D E F G H I J K L M N O P Q R S T U V W X Y Z
전체 가 나 다 라 마 바 사 아 자 차 카 타 파 하

Showing results 1 to 1 of 1

SCIESCOPUS
Communication—Synergistic Effect of Mixed Particle Size on W CMP Process: Optimization Using Experimental Design

Seo, Jihoon; Moon, Jinok; Kim, Yehwan; Kim, Kijung; Lee, Kangchun; Cho, Yoonsung; Lee, Dong-Hee; Paik, Ungyu

ArticleIssue Date2017CitationECS Journal of Solid State Science and Technology, v.6, no.1, pp P42 - P44PublisherElectrochemical Society, Inc.
1
CONTACT US

RSS_1.0 RSS_2.0 ATOM_1.0

222, Wangsimni-ro, Seongdong-gu, Seoul, 04763, Korea+82-2-2220-1366

COPYRIGHT © 2024 HANYANG UNIVERSITY.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.

BROWSE

한국어