Jun, Myungsim; Jang, Moongyu; Kim, Yarkeon; Choi, Cheljong; Kim, Taeyoub; Oh, Soonyoung; Lee, Seongjae
ArticleIssue Date2008CitationJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v.26, no.1, pp 137 - 140PublisherAmerican Institute of Physics