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Pt Nanocrystals Embedded in Remote Plasma Atomic-Layer-Deposited HfO2 for Nonvolatile Memory DevicesGo to Link

Kim, Honggyu; Woo, Sanghyun; Kim, Hyungchul; Bang, Seokhwan; Kim, Yongchan; Choi, Daesik; Jeon, Hyeongtag

ArticleIssue Date2009CitationElectrochemical and Solid-State Letters, v.12, no.4, pp H92 - H94PublisherElectrochemical Society, Inc.
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