Choi, Kwang-Wook; Kim, Ilhwan; Chung, Seokwhan; Sung, Gi-Bong; Yook, Se Jin
ArticleIssue Date2023CitationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), v.2023-January, pp.993 - 996PublisherInstitute of Electrical and Electronics Engineers Inc.