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A harmonic method for measuring electron temperature and ion density using an asymmetric double probe Go to Link

Eo, Hyundong; Park, Sung Joon; Kim, Ju Ho; Chung, Chin-Wook

ArticleIssue Date2024CitationPlasma Sources Science and Technology, v.33, no.2, pp 1 - 10PublisherInstitute of Physics Publishing

SCIESCOPUS

A method for measuring electron temperature and ion density with immunity to RF fluctuation and ion current Go to Link

Eo, Hyundong; Kim, Kyung-Hyun; Lee, Moo-Young; Kim, Ju Ho; Chung, Chin-Wook

ArticleIssue Date2023CitationPHYSICS OF PLASMAS, v.30, no.2, pp.1 - 8PublisherAIP Publishing

SCIESCOPUS

A wafer-like apparatus for two-dimensional measurement of plasma parameters and temperature distribution in low-temperature plasmas Go to Link

Lim, Yeong-Min; Eo, Hyundong; Kim, Kyung-Hyun; Lee, Moo-Young; Chung, Chin Wook

ArticleIssue Date2021CitationReview of Scientific Instruments, v.92, no.5, pp.1 - 11PublisherAmerican Institute of Physics Inc.

SCIESCOPUS

Improvement of the floating probe method for ion density and electron temperature measurement without compensation due to voltage reduction across the sheath Go to Link

Lee, Moo-Young; Seo, Jong-In; Eo, Hyundong; Kim, Tae-Woo; Jung, Jiwon; Lim, Yeong-Min; Chung, Chin-Wook

ArticleIssue Date2021CitationPLASMA SOURCES SCIENCE & TECHNOLOGY, v.30, no.6, pp.1 - 8PublisherIOP PUBLISHING LTD

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Browsing by Eo, HyundongAuthor

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