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SCIESCOPUS
Crystallinity-Preserving Atomic Layer Etching of Ultrathin In2O3 for Stable Oxide NanoelectronicsGo to Link

Kim, Min Chan; Yang, Hae Lin; Gwoen, Ji Hyun; Shin, Seong-A.; Kim, Min-Seo; Park, Jin-Seong

ArticleIssue Date2025CitationACS Nano, v.19, no.45, pp 39362 - 39370PublisherAMER CHEMICAL SOC
SCOPUS
Enhancing TCO Performance: Low-Temperature PEALD-Deposited In2O3 Thin FilmsGo to Link

Kim, Tae-kyung; Gwoen, Ji Hyun; Kim, Hae Dam; Park, Jin-seong

ArticleIssue Date2025Citation2025 IEEE International Interconnect Technology Conference (IITC), pp 1 - 3PublisherInstitute of Electrical and Electronics Engineers Inc.
SCIESCOPUS
Unlocking the synergy of ALD and ALE: tailoring crystallinity and etch rates in ZnO thin films at the atomic scaleGo to Link

Gwoen, Ji Hyun; Yang, Hae Lin; Kim, Min Chan; Jeong, Gyeong Min; Kim, Tae Kyung; Visser, Cas; Kessels, Wilhelmus M.M. (Erwin); Park, Jin-Seong

ArticleIssue Date2026CitationApplied Surface Science, v.717, pp 1 - 10PublisherElsevier BV
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