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SCIESCOPUS
Effect of Grain-Size Control on Mechanical and Optical Properties of ZrSi2 Membranes for Extreme Ultraviolet PelliclesGo to Linkopen access

Kim, Won Jin; Wi, Seong Ju; Moon, Seungchan; Hong, Junho; Lee, Taeho; Park, Young Wook; Ahn, Jinho

ArticleIssue Date2026CitationCRYSTALS, v.16, no.2, pp 1 - 10PublisherMDPI
SCOPUS
EUV ptychographic imaging for high fidelity actinic inspection of periodic mask patterns with EUV ptychography microscopeGo to Link

Hong, Junho; Moon, Seungchan; Ahn, Jinho

ArticleIssue Date2025CitationProceedings of SPIE - The International Society for Optical Engineering, v.13426, pp 1 - 5PublisherSPIE
SCIESCOPUS
Experimental investigation of the mask diffraction light blocking with critical-sized Sn particles on the EUV pellicleGo to Link

Moon, Seungchan; Lee, Dong Gi; Choi, Jinhyuk; Hong, Junho; Ahn, Jinho

ArticleIssue Date2023CitationProceedings of SPIE - The International Society for Optical Engineering, v.12750, pp 1 - 6PublisherSPIE
SCIESCOPUS
Impact of Sn Particle-Induced Mask Diffraction on EUV Lithography Performance Across Different Pattern TypesGo to Linkopen access

Moon, Seungchan; Lee, Dong Gi; Choi, Jinhyuk; Hong, Junho; Lee, Taeho; Ekinci, Yasin; Ahn, Jinho

ArticleIssue Date2025CitationPhotonics, v.12, no.3, pp 1 - 13PublisherMDPI AG
SCIESCOPUS
Multimodal AI for risk stratification in autism spectrum disorder: integrating voice and screening toolsGo to Linkopen access

Bae, Sookyung; Hong, Junho; Ha, Sungji; Moon, Jiwoo; Yu, Jaeeun; Choi, Hangnyoung; Lee, Junghan; Do, Ryemi; Sim, Hewoen; Kim, Hanna, et al.

ArticleIssue Date2025Citationnpj Digital Medicine, v.8, no.1, pp 1 - 15PublisherNATURE PUBLISHING GROUP
SCIESCOPUS
Resolution Enhancement in Extreme Ultraviolet Ptychography Using a Refined Illumination Probe and Small-Etendue SourceGo to Linkopen access

Moon, Seungchan; Hong, Junho; Lee, Taeho; Ahn, Jinho

ArticleIssue Date2025CitationPhotonics, v.12, no.8, pp 1 - 12PublisherMDPI AG
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