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Relationship between the discharge mode and the spatial oxygen plasma distribution in a large size ferrite inductively coupled plasmasGo to Link

Kim, Hyun Jun; Hwang, Hye Ju; Kim, Dong Hwan; Cho, Jeong Hee; Chae, Hee Sun; Chung, Chin-Wook

ArticleIssue Date2015CitationPhysics of Plasmas, v.22, no.4, pp 1 - 8PublisherAmerican Institute of Physics
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