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Unveiling growth mechanisms of PEALD In2O3 thin films with amide-based versus alkyl-based novel indium precursorsGo to Link

Jeong, Gyeong Min; Yang, Hae Lin; Yoon, Ara; Kim, Yoon-Seo; Lee, Sangick; Kwone, Yonghee; Jeon, Sangyong; Im, Youngjae; Park, Jin-Seong

ArticleIssue Date2024CitationJournal of Materials Chemistry C, v.12, no.28, pp 10575 - 10584PublisherRoyal Society of Chemistry
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