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Thermal analysis of implanter source head in radio-frequency inductively coupled plasmaGo to Link

Jeong, Chang-Won; Ryu, Choong-Mo; Lee, Hee-Lak; Hwang, Jong Jin; Moon, Seung Jae

ArticleIssue Date2024CitationJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v.42, no.2, pp 1 - 10PublisherAmerican Institute of Physics
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