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Optimizing the Crystallinity of a ZrO2 Thin Film Insulator for InGaZnO-Based Metal–Insulator–Semiconductor CapacitorsGo to Linkopen access

Nam, Minkyeong; Lee, Seungwoo; Jeong, Hanseok; Yoon, Ara; Park, Jin-Seong; Jeon, Woojin

ArticleIssue Date2024CitationAdvanced Materials Interfaces, v.11, no.11, pp 1 - 6PublisherJohn Wiley and Sons Ltd
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