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Atomic layer deposition of indium oxide thin film from a liquid indium complex containing 1-dimethylamino-2-methyl-2-propoxy ligandsGo to Link

Han, Jeong Hwan; Jung, Eun Ae; Kim, Hyo Yeon; Kim, Da Hye; Park, Bo Keun; Park, Jin-Seong; Son, Seung Uk; Chung, Taek-Mo

ArticleIssue Date2016CitationApplied Surface Science, v.383, pp 1 - 8PublisherElsevier BV
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Low-Temperature Growth of Indium Oxide Thin Film by Plasma-Enhanced Atomic Layer Deposition Using Liquid Dimethyl(N-ethoxy-2,2-dimethylpropanamido)indium for High-Mobility Thin Film Transistor ApplicationGo to Link

Kim, Hyo Yeon; Jung, Eun Ae; Mun, Geumbi; Agbenyeke, Raphael E.; Park, Bo Keun; Park, Jin-Seong; Son, Seung Uk; Jeon, Dong Ju; Park, Sang-Hee Ko; Chung, Taek-Mo, et al.

ArticleIssue Date2016CitationACS Applied Materials & Interfaces, v.8, no.40, pp 26924 - 26931PublisherAmerican Chemical Society
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