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The behavior of substrate dependency as surface treatment in the positive chemically amplified resistGo to Link

Yang, Sin-Ju; Cha, Han-sun; Kang, Ju-Hyun; Yang, Chul-Kyu; Ahn, Jin ho; Nam, Kee-Soo

ArticleIssue Date2007CitationProceedings of SPIE - The International Society for Optical Engineering, v.6730PublisherSPIE
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The study of the birefringence as MoSi based materials for immersion lithographyGo to Link

Kang, Ju-Hyun; Cha, Han-Sun; Yang, Sin-Ju; Ahn, Jin Ho; Nam, Kee-Soo

ArticleIssue Date2009CitationProceedings of SPIE - The International Society for Optical Engineering, v.7488, pp 1 - 11PublisherSPIE
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