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Characterization of Ru layer for capping/buffer application in EUVL mask Go to Link

Kim, Tae Geun; Lee, Seung Yoon; Kim, Chung Yong; Park, In-Sung; Kang, In-Yong; Lee, Nae-Eung; Chung, Yong-Chae; Ahn, Jinho

ArticleIssue Date2006CitationMicroelectronic Engineering, v.83, no.4-9, pp 688 - 691PublisherElsevier BV

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Novel absorber stack for minimizing shadow effect in extreme ultraviolet mask Go to Link

Kim, Tae Geun; Kim, Byung Hun; Kang, In-Yong; Chung, Yong-Chae; Ahn, Jinho; Lee, Seung Yoon; Park, In-Sung; Kim, Chung Yong; Lee, Nae-Eung

ArticleIssue Date2006CitationJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v.24, no.6, pp 2820 - 2823PublisherAmerican Institute of Physics

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Study of a thin Al2O3/TaN absorber stack on Ru-capped multilayers

Kim, Tae Geun; Kim, Byung Hun; Kang, In-Yong; Chung, Yong-Chae; Ahn, Jinho; Lee, Seung Yoon; Park, In-Sung; Kim, Chung Yong; Lee, Nae-Eung

ArticleIssue Date2006CitationJournal of the Korean Physical Society, v.49, pp S721 - S725Publisher한국물리학회

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Browsing by Kim, Chung YongAuthor

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