Kim, Tae Geun; Kim, Byung Hun; Kang, In-Yong; Chung, Yong-Chae; Ahn, Jinho; Lee, Seung Yoon; Park, In-Sung; Kim, Chung Yong; Lee, Nae-Eung
ArticleIssue Date2006CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.24, no.6, pp.2820 - 2823PublisherA V S AMER INST PHYSICS