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A novel solution for next-generation EUV pellicle: Breathable membrane with increased transmittanceGo to Link

Kim, Haneul; Kim, Jungyeon; Kang, Young-Woo; Kim, Min-Woo; Ha, Tae Joong; Lee, Gi Sung; Oh, Hye-Keun; Ahn, Jinho

ArticleIssue Date2024CitationOPTICAL AND EUV NANOLITHOGRAPHY XXXVII, v.12953, pp 1 - 5PublisherSPIE-INT SOC OPTICAL ENGINEERING
SCIESCOPUS
Conformal SiNx Coating on Carbon Nanotubes via Transient UV–Ozone Functionalization and Two-Step Atomic Layer DepositionGo to Linkopen access

Kang, Young Woo; Kim, Haneul; Lee, Inseo; Kim, Yongkyung; Park, In-Sung; Ahn, Jinho

ArticleIssue Date2026CitationMATERIALS, v.19, no.10, pp 1 - 14PublisherMDPI
SCIESCOPUS
Crystalline Phase-Dependent Emissivity of MoSi2 Nanomembranes for Extreme Ultraviolet Pellicle ApplicationsGo to Linkopen access

Kim, Haneul; Kang, Young Woo; Kim, Jungyeon; Lee, Taeho; Ahn, Jinho

ArticleIssue Date2025CitationNanomaterials, v.15, no.19, pp 1 - 10PublisherMDPI
SCOPUS
Development of a Porous Patterned Membrane with a Large Field Size for EUV Pellicles

Ha, Tae Joong; Lee, Gi-Sung; Kim, Haneul; Kim, Jungyeon; Ahn, Jinho

ArticleIssue Date2024CitationProceedings of SPIE - The International Society for Optical Engineering, v.13215, pp 1 - 4PublisherSPIE
SCIESCOPUS
Hole-Patterned Pellicles: A Structural Approach for Improved Extreme Ultraviolet Transmittance and Mechanical BehaviorGo to Linkopen access

Kim, Haneul; Kim, Jungyeon; Kang, Young Woo; Lee, Taeho; Kim, Min-Woo; Ha, Tae Joong; Oh, Hye-Keun; Ahn, Jinho

ArticleIssue Date2025CitationMATERIALS, v.19, no.1, pp 1 - 14PublisherMDPI
SCOPUS
Impact of nano-scale grain size on the properties of ZrSi2 EUV pelliclesGo to Link

Kim, Won Jin; Kim, Haneul; Kang, Young Woo; Park, Young Wook; Ahn, Jinho

ArticleIssue Date2025CitationProceedings of SPIE - The International Society for Optical Engineering, v.13424, pp 1 - 4PublisherSPIE
SCIESCOPUS
Thermal atomic layer deposition of SiNx protective coatings for hydrogen plasma-resistant carbon nanotube pelliclesGo to Link

Kang, Young Woo; Kim, Haneul; Lee, Inseo; Lee, Taeho; Park, In-Sung; Ahn, Jinho

ArticleIssue Date2026CitationApplied Surface Science, v.738, pp 1 - 7PublisherElsevier B.V.
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