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CMOS-compatible Si metasurface at visible wavelengths prepared by low-temperature green laser annealingGo to Link

Lee, Jeong Yub; Kim, Yongsung; Han, Seunghoon; Kim, Jaekwan; Yoon, Jae Woong; Lee, Ki Young; Song, Seok Ho; Yang, Kiyeon; Lee, Chang Seung

ArticleIssue Date2019CitationNANOTECHNOLOGY, v.30, no.4, pp.1 - 10PublisherIOP PUBLISHING LTD
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