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Comparison of plasma densities measured by using electrical probes to those measured by using microwave probes in inductively coupled plasmas

Kim, Won-Ki; Lee, Min-Hyong; Chung, Chin-Wook; Kim, Jung-Hyung

ArticleIssue Date2006CitationJournal of the Korean Physical Society, v.49, no.4, pp 1687 - 1690Publisher한국물리학회
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