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A novel solution for next-generation EUV pellicle: Breathable membrane with increased transmittanceGo to Link

Kim, Haneul; Kim, Jungyeon; Kang, Young-Woo; Kim, Min-Woo; Ha, Tae Joong; Lee, Gi Sung; Oh, Hye-Keun; Ahn, Jinho

ArticleIssue Date2024CitationOPTICAL AND EUV NANOLITHOGRAPHY XXXVII, v.12953, pp 1 - 5PublisherSPIE-INT SOC OPTICAL ENGINEERING
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Crystalline Phase-Dependent Emissivity of MoSi2 Nanomembranes for Extreme Ultraviolet Pellicle ApplicationsGo to Linkopen access

Kim, Haneul; Kang, Young Woo; Kim, Jungyeon; Lee, Taeho; Ahn, Jinho

ArticleIssue Date2025CitationNanomaterials, v.15, no.19, pp 1 - 10PublisherMDPI
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Development of a Porous Patterned Membrane with a Large Field Size for EUV Pellicles

Ha, Tae Joong; Lee, Gi-Sung; Kim, Haneul; Kim, Jungyeon; Ahn, Jinho

ArticleIssue Date2024CitationProceedings of SPIE - The International Society for Optical Engineering, v.13215, pp 1 - 4PublisherSPIE
SCIESCOPUS
Hole-Patterned Pellicles: A Structural Approach for Improved Extreme Ultraviolet Transmittance and Mechanical BehaviorGo to Linkopen access

Kim, Haneul; Kim, Jungyeon; Kang, Young Woo; Lee, Taeho; Kim, Min-Woo; Ha, Tae Joong; Oh, Hye-Keun; Ahn, Jinho

ArticleIssue Date2025CitationMATERIALS, v.19, no.1, pp 1 - 14PublisherMDPI
SCISCIESCOPUS
Optimization of hexanoic acid production in recombinant Escherichia coli by precise flux rebalancingGo to Link

Kim, Seong Gyeong; Jang, Sungho; Lim, Jae Hyung; Jeon, Byoung Seung; Kim, Jungyeon; Kim, Kyoung Heon; Sang, Byoung-In; Jung, Gyoo Yeol

ArticleIssue Date2018CitationBioresource Technology, v.247, pp 1253 - 1257PublisherElsevier BV
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