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SCIESCOPUS

A method for measuring individual ion density in an Ar/He mixture inductively coupled plasma Go to Link

Son, Jin-Ung; Lee, Moo-Hyun; Kim, Min-Seok; Jung, Jiwon; Seo, Beom-Jun; Kim, Ju-Ho; Chung, Chin-Wook

ArticleIssue Date2025CitationPlasma Sources Science and Technology, v.34, no.3, pp 1 - 10PublisherInstitute of Physics Publishing

SCIESCOPUS

Abnormal behavior of the plasma potential in an inductively coupled plasma with a DC-biased grid Go to Link

Kim, Min-Seok; Jung, Jiwon; Park, Junyoung; Chung, Chin-Wook

ArticleIssue Date2024CitationPlasma Sources Science and Technology, v.33, no.8, pp 1 - 9PublisherInstitute of Physics Publishing

SCIE

Anomalous electron density of helium, neon, and argon plasmas in high-pressure E-mode inductively coupled plasma Go to Link

Kim, Min-Seok; Young, Hun-Hong; Chung, Chin-Wook

ArticleIssue Date2026CitationPLASMA SOURCES SCIENCE & TECHNOLOGY, v.35, no.2, pp 1 - 11PublisherIOP Publishing Ltd

SCIESCOPUS

Atomic Layer Etching of SiO2 Utilizing Ultra-Low Electron Temperature Plasma Go to Link

Park, Junyoung; Kim, Nayeon; Choi, Jung-Eun; Yeo, Yujin; Kim, Min-Seok; Lim, Chang-Min; Seo, Beom-Jun; Chung, Chin-Wook

ArticleIssue Date2025CitationACS Applied Electronic Materials, v.7, no.10, pp 4520 - 4528PublisherAmerican Chemical Society

SCIESCOPUS

Charge-free plasma processing using ultra-low electron temperature plasma for atomic-scale semiconductor devices Go to Link

Kim, Min-Seok; Kim, Na Yeon; Park, Junyoung; Chung, Chin-Wook

ArticleIssue Date2025CitationPlasma Sources Science and Technology, v.34, no.4, pp 1 - 9PublisherInstitute of Physics Publishing

SCIESCOPUS

Control of photoresist etch rate via a gradient magnetic field in biased inductively coupled plasma Go to Link

Jiang, Yi-Lang; Jeong, Yeong Jae; Kim, Jae-Hwi; Kim, Min-Seok; Lee, Myoung-Jae; Kim, Ju-Ho; Chung, Chin-Wook

ArticleIssue Date2025CitationPlasma Sources Science and Technology, v.34, no.7, pp 1 - 13PublisherInstitute of Physics Publishing

SCIESCOPUS

Control of the photoresist etch uniformity in inductive discharge with magnetic resonance wireless power transfer Go to Link

Park, Junyoung; Hong, Young-Hun; Kang, Gil-Ho; Kim, Min-Seok; Seo, Beom-Jun; Kim, Ju-Ho; Chung, Chin-Wook

ArticleIssue Date2025CitationPlasma Sources Science and Technology, v.34, no.2, pp 1 - 13PublisherInstitute of Physics Publishing

SCIESCOPUS

Damage-Free Plasma Source for Atomic-Scale Processing Go to Link

Park, Junyoung; Jung, Jiwon; Kim, Min-Seok; Lim, Chang-Min; Choi, Jung-Eun; Kim, Nayeon; Kim, Ju-Ho; Chung, Chin-Wook

ArticleIssue Date2024CitationNano Letters, v.24, no.37, pp 11462 - 11468PublisherAmerican Chemical Society

SCIESCOPUS

Effect of a DC gradient magnetic field on electron density in a weakly magnetized inductively coupled plasma Go to Link

He, You; Jiang, Yi-Lang; Lee, Myoung-Jae; Kim, Min-Seok; Seo, Beom-Jun; Kim, Ju-Ho; Chung, Chin-Wook

ArticleIssue Date2024CitationJournal of Vacuum Science and Technology A, v.42, no.6, pp 1 - 12PublisherAmerican Institute of Physics

SCIESCOPUS

Effect of In Situ Al Roll Coating on Strip Surface Quality in Traditional Twin-Roll Casting of Aluminum Alloys Go to Link open access

Cho, Han-Gyoung; Kim, Young Do; Kim, Min-Seok

ArticleIssue Date2025CitationMetals, v.15, no.4, pp 1 - 13PublisherMultidisciplinary Digital Publishing Institute (MDPI)

SCIESCOPUS

Effect of RF bias power on discharge mode transition and its hysteresis in inductively coupled plasmas Go to Link

Zhang, Aixian; Kim, Min-Seok; Hong, Young-Hun; Moon, Jun-Hyeon; Kim, Kyung-Hyun; Chung, Chin Wook

ArticleIssue Date2022CitationPHYSICS OF PLASMAS, v.29, no.1, pp.1 - 10PublisherAMER INST PHYSICS

SCIESCOPUS

Electron-kinetic reactor engineering for damage-free, high-selectivity plasma etching Go to Link

Kim, Min-Seok; Yeo, Yujin; Nahm, Hyeon Ho; Chung, Chin-Wook

ArticleIssue Date2026CitationCHEMICAL ENGINEERING JOURNAL, v.533, pp 1 - 8PublisherELSEVIER SCIENCE SA

SCIESCOPUS

Enhanced anisotropy in advanced semiconductor nanofabrication via ultralow electron temperature plasma for cryogenic etching Go to Link

Kim, Min-Seok; Ahn, Jong Ha; Kim, Deok Hwan; Ha, Seok Hyeon; Chung, Chin-Wook

ArticleIssue Date2026CitationMaterials Science in Semiconductor Processing, v.202, pp 1 - 7PublisherElsevier Ltd

SCIESCOPUS

Experimental observation of enhanced electron cyclotron resonance heating and nonlocal electron kinetics induced by Ramsauer-Townsend effect in ultralow electron temperature plasmas Go to Link

Kim, Min-Seok; Lee, Jeong-Hyun; Choi, Jung-Eun; Chung, Chin-Wook

ArticleIssue Date2025CitationPHYSICAL REVIEW E, v.112, no.4, pp 1 - 5PublisherAMER PHYSICAL SOC

SCIESCOPUS

Friction identification of ball-screw driven servomechanisms through the limit cycle analysis Go to Link

Kim, Min-Seok; Chung, Sung-Chong

ArticleIssue Date2006CitationMechatronics, v.16, no.2, pp 131 - 140PublisherPergamon Press Ltd.

SCIESCOPUS

Integrated design methodology of ball-screw driven servomechanisms with discrete controllers. Part I: Modelling and performance analysis Go to Link

Kim, Min-Seok; Chung, Sung-Chong

ArticleIssue Date2006CitationMechatronics, v.16, no.8, pp 491 - 502PublisherPergamon Press Ltd.

SCIESCOPUS

Integrated design methodology of ball-screw driven servomechanisms with discrete controllers. Part II: Formulation and synthesis of the integrated design Go to Link

Kim, Min-Seok; Chung, Sung-Chong

ArticleIssue Date2006CitationMechatronics, v.16, no.8, pp 503 - 512PublisherPergamon Press Ltd.

SCIESCOPUS

Plasma-Enhanced Atomic Layer Deposition of TiN Thin Films Using Ultralow Electron Temperature Plasma

Kim, Min-Seok; Lim, Chang-Min; Kim, Sung Hoon; Kim, Dongmin; Jeon, Hyeongtag; Chung, Chin Wook

ArticleIssue Date2025CitationACS Applied Materials & Interfaces, v.17, no.7, pp 11227 - 11235PublisherAmerican Chemical Society

SCIE

Precise control of low-energy electron beam for selective radical density control Go to Link

Kim, Min-Seok; Lim, Changmin; Nahm, Hyunho; Chung, Chin-Wook

ArticleIssue Date2026CitationPLASMA SOURCES SCIENCE & TECHNOLOGY, v.35, no.2, pp 1 - 10PublisherIOP Publishing Ltd

SCIESCOPUS

Prediction of Grain Structure and Texture in Twin-Roll Cast Aluminum Alloys Using Cellular Automaton-Finite Element Method Go to Link

Cho, Han-Gyoung; Kim, Young Do; Kim, Min-Seok

ArticleIssue Date2025CitationMaterials, v.18, no.5, pp 1 - 13PublisherMDPI Open Access Publishing

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Browsing by Kim, Min-SeokAuthor

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