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Suppression of boron diffusion using carbon co-implantation in DRAMGo to Link

Lee, Suk Hun; Park, Se Geun; Kim, Shin Deuk; Jung, Hyuck-Chai; Kim, Il Gweon; Kang, Dong-Ho; Kim, Dae Jung; Lee, Kyu Pil; Choi, Joo Sun; Baek, Jung-Woo, et al.

ArticleIssue Date2016CitationMaterials Research Bulletin, v.82, pp 22 - 25PublisherPergamon Press Ltd.
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