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Nitrogen Doping Strategy in SiO2 Insulators for Stable and Hydrogen-Resistant ALD-IGZO TFTsGo to Link

Kim, Tae Heon; Kim, Dong-Gyu; Kim, Sang-Hyun; Kim, Tae-Kyung; Song, Ki-Cheol; Lee, Yeonhee; Park, Jin-Seong

ArticleIssue Date2025CitationACS Applied Materials & Interfaces, v.17, no.13, pp 19928 - 19937PublisherAmerican Chemical Society
SCIESCOPUS
Precursor ligand chemistry-driven engineering of SiNx gate insulators for enhanced IGZO TFTsGo to Link

Kim, Tae Heon; Kim, Sang-Hyun; Yang, YuJin; Kim, Ji Min; Kim, Tae-Kyung; Song, Ki-Cheol; Lee, Yeonhee; Park, Jin-Seong

ArticleIssue Date2026CitationApplied Surface Science, v.719, pp 1 - 10PublisherElsevier BV
SCIESCOPUS
Precursor-driven nucleation and texture control governing resistivity in low-temperature In2O3 filmsGo to Link

Kim, Tae-Kyung; Gwoen, Ji-Hyun; Han, Ju-Hwan; Kim, Hae-Dam; Kim, Ji Min; Kim, Tae-Heon; Kim, Sang-Hyun; Song, Ki-Cheol; Park, Jin-Seong

ArticleIssue Date2025CitationJOURNAL OF ALLOYS AND COMPOUNDS, v.1044, pp 1 - 9PublisherELSEVIER SCIENCE SA
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