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Effect of Grain-Size Control on Mechanical and Optical Properties of ZrSi2 Membranes for Extreme Ultraviolet PelliclesGo to Linkopen access

Kim, Won Jin; Wi, Seong Ju; Moon, Seungchan; Hong, Junho; Lee, Taeho; Park, Young Wook; Ahn, Jinho

ArticleIssue Date2026CitationCRYSTALS, v.16, no.2, pp 1 - 10PublisherMDPI
SCOPUS
Impact of nano-scale grain size on the properties of ZrSi2 EUV pelliclesGo to Link

Kim, Won Jin; Kim, Haneul; Kang, Young Woo; Park, Young Wook; Ahn, Jinho

ArticleIssue Date2025CitationProceedings of SPIE - The International Society for Optical Engineering, v.13424, pp 1 - 4PublisherSPIE
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