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Cocktail Precursor Approach for Homogeneous ALD InGaO Film Growth Overcoming Limits of Mobility–Reliability Trade-Off in Oxide Semiconductors

Ryu, Seong-Hwan; Kim, Dong-Gyu; Koo, Haklim; Yeom, Kyuhyun; Ryu, Dae Won; Park, Chang-Kyun; Park, Jin-Seong

ArticleIssue Date2026CitationACS Applied Materials and Interfaces, v.18, no.4, pp 7148 - 7158PublisherAmerican Chemical Society

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Controlled 2D growth approach via atomic layer deposition for improved stability and performance in flexible SnO thin-film transistors Go to Link

Kim, Hye-Mi; Lee, Won-Bum; Koo, Haklim; Kim, Seo-Yeong; Park, Jin-Seong

ArticleIssue Date2024CitationJournal of Materials Chemistry C, v.12, no.23, pp 8390 - 8397PublisherRoyal Society of Chemistry

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Reliability Improvement of High Mobility Oxide TFTs Based on Hydrogen-Resistant PEALD Al2O3 Gate Insulators Grown with N2O Plasma Go to Link

Kim, Sang-Hyun; Kim, Yoon-Seo; Hwang, Taewon; Kim, Tae Heon; Koo, Haklim; Park, Joon Seok; Park, Jin-Seong

ArticleIssue Date2025CitationACS Applied Materials & Interfaces, v.17, no.9, pp 14168 - 14178PublisherAmerican Chemical Society

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Browsing by Koo, HaklimAuthor

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