Jang, Woochool; Kim, Hyunjung; Kweon, Youngkyun; Jung, Chanwon; Cho, Haewon; Shin, Seokyoon; Kim, Hyunjun; Lim, Kyungpil; Jeon, Hyeongtag; Lim, Heewoo
ArticleIssue Date2018CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.36, no.3PublisherA V S AMER INST PHYSICS