Park, Y. R.; Ahn, J. H.; Kim, J. S.; Kwon, B. S.; Lee, N. -E.; Kang, H. Y.; Hwangbo, C. K.; Ahn, Jinho; Seo, Hwan Seok
ArticleIssue Date2010CitationJournal of Vacuum Science and Technology A, v.28, no.4, pp 761 - 765PublisherAmerican Institute of Physics