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Heterogeneous monolithic 3D integration for hybrid vertical CMOS inverter using n-type IGTO TFT on p-type Si FET

Lee, Chanseul; Kim, Sunbum; Kim, Gyulee; Choi, Changhwan

ArticleIssue Date2025CitationMaterials Science in Semiconductor Processing, v.185, pp 1 - 9PublisherPergamon Press
SCIESCOPUS
Material and Electrical Characteristics of a Thin-Film Transistor Using Cationic Composition-Controlled Atomic Layer-Deposited In–Ga–Sn–O (IGTO) Thin FilmGo to Link

Lee, Chanseul; Kim, Sunbum; Min, Kyoung Yeon; Kim, Gyulee; Kim, Minhyuk; Park, Yongjoo; Choi, Changhwan

ArticleIssue Date2026CitationACS Applied Electronic Materials, v.8, no.3, pp 1080 - 1087PublisherAmerican Chemical Society
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