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Experimental investigation of the mask diffraction light blocking with critical-sized Sn particles on the EUV pellicleGo to Link

Moon, Seungchan; Lee, Dong Gi; Choi, Jinhyuk; Hong, Junho; Ahn, Jinho

ArticleIssue Date2023CitationProceedings of SPIE - The International Society for Optical Engineering, v.12750, pp 1 - 6PublisherSPIE
SCIESCOPUS
Impact of Sn Particle-Induced Mask Diffraction on EUV Lithography Performance Across Different Pattern TypesGo to Linkopen access

Moon, Seungchan; Lee, Dong Gi; Choi, Jinhyuk; Hong, Junho; Lee, Taeho; Ekinci, Yasin; Ahn, Jinho

ArticleIssue Date2025CitationPhotonics, v.12, no.3, pp 1 - 13PublisherMDPI AG
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