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A Study of Advanced Spherical Motor for Improvement of Multi-DOF MotionGo to Link

Park, Hyun-Jong; Cho, Su-Yeon; Ahn, Han-Woong; Lee, Ho-Jun; Won, Sung-Hong; Lee, Ju

ArticleIssue Date2012CitationJournal of Electrical Engineering & Technology, v.7, no.6, pp 926 - 931Publisher대한전기학회
SCIESCOPUSKCI
Characteristics of inductively coupled plasma radio-frequency ion source of ion implanters for high number density dopant generationGo to Link

Hwang, Jong Jin; Ryu, Choong-Mo; Sim, Hyo Jun; Lee, Ho-Jun; Moon, Seung Jae

ArticleIssue Date2024CitationCURRENT APPLIED PHYSICS, v.65, pp 53 - 59PublisherELSEVIER
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