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High-throughput and performance InZnAlO thin film transistor on polyimide substrate via atmospheric pressure spatial atomic layer depositionGo to Link

Kim, Daejung; Yoo, Kwang Su; Lee, Chi-Hoon; Kim, Ji-Min; Kim, Dong-Gyu; Lee, Hyeon-Woo; Kwon, Hyuck-In; Park, Jin-Seong

ArticleIssue Date2025CitationJournal of Alloys and Compounds, v.1023, pp 1 - 8PublisherElsevier BV
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