Lee, Inhye; Park, Jingyu; Jeon, Heeyoung; Kim, Hyunjung; Shin, Changhee; Shin, Seokyoon; Lee, Kunyoung; Jeon, Hyeongtag
ArticleIssue Date2016CitationJournal of Vacuum Science and Technology A, v.34, no.3, pp 1 - 6PublisherAmerican Institute of Physics