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Conformal SiNx Coating on Carbon Nanotubes via Transient UV–Ozone Functionalization and Two-Step Atomic Layer DepositionGo to Linkopen access

Kang, Young Woo; Kim, Haneul; Lee, Inseo; Kim, Yongkyung; Park, In-Sung; Ahn, Jinho

ArticleIssue Date2026CitationMATERIALS, v.19, no.10, pp 1 - 14PublisherMDPI
SCIESCOPUS
Thermal atomic layer deposition of SiNx protective coatings for hydrogen plasma-resistant carbon nanotube pelliclesGo to Link

Kang, Young Woo; Kim, Haneul; Lee, Inseo; Lee, Taeho; Park, In-Sung; Ahn, Jinho

ArticleIssue Date2026CitationApplied Surface Science, v.738, pp 1 - 7PublisherElsevier B.V.
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