Lee, Jungwoo; Lee, Wonjoo; Park, Taehee; Lee, Jaeseung; Park, Eunkyung; Lee, Donghwan; Lee, Jongtaek; Yi, Whikun
ArticleIssue Date2010CitationJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v.28, no.2, pp C2B43 - C2B46PublisherAmerican Institute of Physics