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Improved Specific Contact Resistivity in Amorphous IGZO Transistors using an ALD-Derived Al-Doped ZnO InterlayerGo to Link

Jeong, Joo Hee; Yoon, Seong Hun; Lee, Seung Hee; Kuh, Bong Jin; Kim, Taikyu; Jeong, Jae Kyeong

ArticleIssue Date2024CitationIEEE Electron Device Letters, v.45, no.5, pp 849 - 852PublisherInstitute of Electrical and Electronics Engineers
SCIESCOPUS
Specific contact resistivity reduction in amorphous IGZO thin-film transistors through a TiN/IGTO heterogeneous interlayerGo to Linkopen access

Jeong, Joo Hee; Seo, Seung Wan; Kim, Dongseon; Yoon, Seong Hun; Lee, Seung Hee; Kuh, Bong Jin; Kim, Taikyu; Jeong, Jae Kyeong

ArticleIssue Date2024CitationScientific Reports, v.14, no.1, pp 1 - 9PublisherNature Publishing Group
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