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Nitrogen-enabled amorphous stabilization of high-mobility in-rich IGO via PEALD for uniform and reliable oxide TFTsGo to Linkopen access

Yang, YuJin; Kim, Sang-Hyun; Kim, Tae Heon; Song, Jeong-Su; Lee, Sun Myung; Song, Ki-Cheol; Lee, Yeonhee; Kim, Yoon-Seo; Park, Jin-Seong

ArticleIssue Date2026CitationMATERIALS TODAY ELECTRONICS, v.16, pp 1 - 11PublisherELSEVIER
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