Lee, Hyun-Mo; Ok, Kyung-Chul; Jeong, Hyun-Jun; Park, Jin-Seong; Lim, Junhyung; Park, Jozeph
ArticleIssue Date2017CitationJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v.35, no.2PublisherAmerican Institute of Physics