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SCIESCOPUS
A wafer-like apparatus for two-dimensional measurement of plasma parameters and temperature distribution in low-temperature plasmasGo to Link

Lim, Yeong-Min; Eo, Hyundong; Kim, Kyung-Hyun; Lee, Moo-Young; Chung, Chin Wook

ArticleIssue Date2021CitationReview of Scientific Instruments, v.92, no.5, pp.1 - 11PublisherAmerican Institute of Physics Inc.
SCIESCOPUS
Harmonic suppression and uniformity improvement of plasma density in capacitively coupled plasmaGo to Link

Lim, Yeong-Min; Park, So-Yeong; 하우; Hong, Young-Hun; Chung, Chin Wook

ArticleIssue Date2022CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.40, no.6, pp 1 - 10PublisherA V S AMER INST PHYSICS
SCIESCOPUS
Improvement of the floating probe method for ion density and electron temperature measurement without compensation due to voltage reduction across the sheathGo to Link

Lee, Moo-Young; Seo, Jong-In; Eo, Hyundong; Kim, Tae-Woo; Jung, Jiwon; Lim, Yeong-Min; Chung, Chin-Wook

ArticleIssue Date2021CitationPLASMA SOURCES SCIENCE & TECHNOLOGY, v.30, no.6, pp.1 - 8PublisherIOP PUBLISHING LTD
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