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Effects of RF bias frequency and power on the plasma parameters and ash rate in a remote plasma source Go to Link

Zhang, Aixian; Lee, Moo-Young; Lee, Ho-Won; Moon, Ho-Jun; Chung, Chin-Wook

ArticleIssue Date2021CitationPLASMA SOURCES SCIENCE & TECHNOLOGY, v.30, no.2, pp.1 - 9PublisherIOP PUBLISHING LTD

SCIESCOPUS

Evolution of two-dimensional plasma parameters in the plane of the wafer during the E- to H- and H- to E-mode transition in an inductively coupled plasma Go to Link

Park, Il-Seo; Kim, Kyung-Hyun; Kim, Tae-Woo; Kim, Kwan-Youg; Moon, Ho-Jun; Chung, Chin-Wook

ArticleIssue Date2018CitationPLASMA SOURCES SCIENCE & TECHNOLOGY, v.27, no.5PublisherIOP PUBLISHING LTD

SCIESCOPUS

Experimental investigation on the reduction in antenna coil current during the E to H mode transition in an inductively coupled plasma Go to Link

Moon, Jun-Hyeon; Moon, Ho-Jun; Chung, Chin-Wook

ArticleIssue Date2019CitationPHYSICS OF PLASMAS, v.26, no.9, pp.1 - 6PublisherAMER INST PHYSICS

SCIESCOPUS

Generation of high-density plasma via transparent electrode in capacitively coupled plasma Go to Link

Moon, Ho-Jun; Jung, Jiwon; Park, Junyoung; Chung, Chin-Wook

ArticleIssue Date2024CitationPlasma Sources Science and Technology, v.33, no.8, pp 1 - 9PublisherInstitute of Physics Publishing

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Browsing by Moon, Ho-JunAuthor

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