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전체 가 나 다 라 마 바 사 아 자 차 카 타 파 하

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SCIESCOPUS
Control of the spatial distribution of ion flux in dual inductively coupled plasmasGo to Link

Cho, Sung-Won; Moon, Jun-Hyeon; Zhang, Aixian; Chung, Chin-Wook

ArticleIssue Date2021CitationJournal of Applied Physics, v.129, no.10, pp 1 - 8PublisherAmerican Institute of Physics
SCIESCOPUS
Effect of RF bias power on discharge mode transition and its hysteresis in inductively coupled plasmasGo to Link

Zhang, Aixian; Kim, Min-Seok; Hong, Young-Hun; Moon, Jun-Hyeon; Kim, Kyung-Hyun; Chung, Chin Wook

ArticleIssue Date2022CitationPHYSICS OF PLASMAS, v.29, no.1, pp.1 - 10PublisherAMER INST PHYSICS
SCISCIESCOPUS
Effects of antenna coil turns on plasma density and antenna voltage in solenoidal inductively coupled plasmasGo to Link

Moon, Jun-Hyeon; Kim, Kyung-Hyun; Lin, Ming-Chieh; Chung, Chin-Wook

ArticleIssue Date2016CitationPhysics of Plasmas, v.23, no.11, pp 1 - 5PublisherAmerican Institute of Physics
SCIESCOPUS
Electrical and plasma characterization of a hybrid plasma source combined with inductively coupled and capacitively coupled plasmas for O atom generationGo to Link

Kim, Kwan-Yong; Kim, Kyung-Hyun; Moon, Jun-Hyeon; Chung, Chin-Wook

ArticleIssue Date2020CitationPHYSICS OF PLASMAS, v.27, no.9, pp.1 - 8PublisherAMER INST PHYSICS
SCIESCOPUS
Experimental investigation on the reduction in antenna coil current during the E to H mode transition in an inductively coupled plasmaGo to Link

Moon, Jun-Hyeon; Moon, Ho-Jun; Chung, Chin-Wook

ArticleIssue Date2019CitationPHYSICS OF PLASMAS, v.26, no.9, pp.1 - 6PublisherAMER INST PHYSICS
SCISCIESCOPUS
Non-invasive probe diagnostic method for electron temperature and ion current density in atmospheric pressure plasma jet sourceGo to Link

Kim, Young-Cheol; Kim, Yu-Sin; Lee, Hyo-Chang; Moon, Jun-Hyeon; Chung, Chin-Wook; Kim, Yunjung; Cho, Guangsup

ArticleIssue Date2015CitationPhysics of Plasmas, v.22, no.8, pp 1 - 6PublisherAmerican Institute of Physics
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