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Study for compensation of unexpected Image Placement error caused by VSB mask writer deflectorGo to Link

Lee, Hyun-joo; Choi, Min-kyu; Moon, Seong-yong; Cho, Han-Ku; Doh, Jonggul; Ahn, Jin ho

ArticleIssue Date2012CitationProceedings of SPIE - The International Society for Optical Engineering, v.8522PublisherSPIE
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