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Effect of Grain-Size Control on Mechanical and Optical Properties of ZrSi2 Membranes for Extreme Ultraviolet Pellicles Go to Link open access

Kim, Won Jin; Wi, Seong Ju; Moon, Seungchan; Hong, Junho; Lee, Taeho; Park, Young Wook; Ahn, Jinho

ArticleIssue Date2026CitationCRYSTALS, v.16, no.2, pp 1 - 10PublisherMDPI

SCOPUS

EUV ptychographic imaging for high fidelity actinic inspection of periodic mask patterns with EUV ptychography microscope Go to Link

Hong, Junho; Moon, Seungchan; Ahn, Jinho

ArticleIssue Date2025CitationProceedings of SPIE - The International Society for Optical Engineering, v.13426, pp 1 - 5PublisherSPIE

SCIESCOPUS

Experimental investigation of the mask diffraction light blocking with critical-sized Sn particles on the EUV pellicle Go to Link

Moon, Seungchan; Lee, Dong Gi; Choi, Jinhyuk; Hong, Junho; Ahn, Jinho

ArticleIssue Date2023CitationProceedings of SPIE - The International Society for Optical Engineering, v.12750, pp 1 - 6PublisherSPIE

SCIESCOPUS

Impact of Sn Particle-Induced Mask Diffraction on EUV Lithography Performance Across Different Pattern Types Go to Link open access

Moon, Seungchan; Lee, Dong Gi; Choi, Jinhyuk; Hong, Junho; Lee, Taeho; Ekinci, Yasin; Ahn, Jinho

ArticleIssue Date2025CitationPhotonics, v.12, no.3, pp 1 - 13PublisherMDPI AG

SCIESCOPUS

Molybdenum carbide pellicle for high-power EUV lithography Go to Link

Kim, Yongkyung; Seong, Kihun; Yoon, Jonghyuk; Lee, Donggi; Moon, Seungchan; Jang, Sung Kyu; Kim, Hyun-Mi; Kim, Seul-Gi; Ahn, Jinho; Kim, Hyeongkeun

ArticleIssue Date2023CitationProceedings of SPIE - The International Society for Optical Engineering, v.12750, pp 1 - 7PublisherSPIE

SCIESCOPUS

Resolution Enhancement in Extreme Ultraviolet Ptychography Using a Refined Illumination Probe and Small-Etendue Source Go to Link open access

Moon, Seungchan; Hong, Junho; Lee, Taeho; Ahn, Jinho

ArticleIssue Date2025CitationPhotonics, v.12, no.8, pp 1 - 12PublisherMDPI AG

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Browsing by Moon, SeungchanAuthor

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